Semiconductor Equipment

Foub Stocker, Pod (Front End)

Foub Stocker, Pod (Front End)

A type of automated storage warehouse system with functions to transport, store and sort carrier (POD, FOUP)
compatible with the SMIF(Standard Mechanical Interface, SEMI E15.1) environment, and is comprised of the central transport robot,
port area that is in charge of loading / unloading of each carrier, and shelf frame part that stores the carrier

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